Katia Vutova, Georgi Mladenov Profile
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Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 1: Exposure Modeling at Electron and Ion Bea Technology by Katia Vutova, Georgi MladenovComputer Simulation of Processes at Electron and Ion Beam Lithography, Part 1: Exposure Modeling at Electron and Ion Bea
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36Pages:
33Published:
Nov 2013The basic steps when modeling the ion and electron exposure processes in multilevel multicomponent amorphous targets by the simulation of particle penetration...
Formats: PDF