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Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications - PDF Preview

Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications

Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications

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A paper that tackles film bulk acoustic wave devices for microfluidic piezoelectric films and use of aluminum nitride as a common piezoelectric material for biosensing applications.
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