Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications
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Author: Stuart Brodie, Richard Fu
Downloads: 53
Pages: 38
Published: 9 years agoRating: Rated: 0 times Rate It
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A paper that tackles film bulk acoustic wave devices for microfluidic piezoelectric films and use of aluminum nitride as a common piezoelectric material for biosensing applications.
