Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications

Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications

Author:

Downloads: 46

Pages: 38

Published: 6 years ago

Rating: Rated: 0 times Rate It

  • 1 star
  • 2 stars
  • 3 stars
  • 4 stars
  • 5 stars

Read Five Books Free!

Become a member of Free-Ebooks.net and you can download five free books every month.

Already a member? Login here

Membership requires a valid email address. We DO NOT spam and do not allow others access to your private information.

Book Description

A paper that tackles film bulk acoustic wave devices for microfluidic piezoelectric films and use of aluminum nitride as a common piezoelectric material for biosensing applications.

Reader Reviews
loading comments
Add a comment: (You need to login to post a comment)
Rate this title: