Nanoimprint Lithography
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Author: Hongbo Lan, Yucheng Ding
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Pages: 39
Published: 10 years agoRating: Rated: 0 times Rate It
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The method of fabricating micro/nanometer scale patterns with low cost, high throughput and high resolution which has demonstrated great potential and commercial prospects in applications such as Hard Disk Drive (HDD), LED, OLED, flexible display, optical and biological devices.
