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Nanoimprint Lithography

Downloads: 8         Pages: 39

Published: 1 year ago

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Author: Hongbo Lan, Yucheng Ding

Book Description Report this book

The method of fabricating micro/nanometer scale patterns with low cost, high throughput and high resolution which has demonstrated great potential and commercial prospects in applications such as Hard Disk Drive (HDD), LED, OLED, flexible display, optical and biological devices.

ABOUT THE AUTHOR

Hongbo Lan, Yucheng Ding

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