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Nanoimprint Lithography

Downloads: 13         Pages: 39

Published: 2 years ago

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Book Description Report this book

The method of fabricating micro/nanometer scale patterns with low cost, high throughput and high resolution which has demonstrated great potential and commercial prospects in applications such as Hard Disk Drive (HDD), LED, OLED, flexible display, optical and biological devices.


Hongbo Lan, Yucheng Ding

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